JPS6311640Y2 - - Google Patents
Info
- Publication number
- JPS6311640Y2 JPS6311640Y2 JP11124680U JP11124680U JPS6311640Y2 JP S6311640 Y2 JPS6311640 Y2 JP S6311640Y2 JP 11124680 U JP11124680 U JP 11124680U JP 11124680 U JP11124680 U JP 11124680U JP S6311640 Y2 JPS6311640 Y2 JP S6311640Y2
- Authority
- JP
- Japan
- Prior art keywords
- ray
- sample
- passage
- rays
- passages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004846 x-ray emission Methods 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 2
- 238000004458 analytical method Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11124680U JPS6311640Y2 (en]) | 1980-08-07 | 1980-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11124680U JPS6311640Y2 (en]) | 1980-08-07 | 1980-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5735648U JPS5735648U (en]) | 1982-02-25 |
| JPS6311640Y2 true JPS6311640Y2 (en]) | 1988-04-05 |
Family
ID=29472362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11124680U Expired JPS6311640Y2 (en]) | 1980-08-07 | 1980-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311640Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6019977A (ja) * | 1983-07-13 | 1985-02-01 | Kazuo Moro | 外接式ギヤポンプの改良 |
-
1980
- 1980-08-07 JP JP11124680U patent/JPS6311640Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5735648U (en]) | 1982-02-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3919548A (en) | X-Ray energy spectrometer system | |
| EP0289861A2 (en) | Detector assembly for analyzer instrument | |
| US6023496A (en) | X-ray fluorescence analyzing apparatus | |
| Spillman et al. | Computer-controlled programmable monochromator system with automated wavelength calibration and background correction | |
| DE19948382A1 (de) | Detektor für grosse Waferflächen | |
| US3903414A (en) | Triple-mode spectrodiffractomer for measuring diffraction, fluorescence, and absorbtion on a single instrument | |
| JP3511826B2 (ja) | 蛍光ｘ線分析装置 | |
| DE3200391C2 (de) | Vorrichtung zur Messung der Fluoreszenzpolarisation | |
| JPS6311640Y2 (en]) | ||
| JPS6137574B2 (en]) | ||
| JP2000504422A (ja) | ２つのコリメータマスクを有するｘ線分析装置 | |
| JPH0252980B2 (en]) | ||
| US3344274A (en) | Ray analysis apparatus having both diffraction amd spectrometer tubes mounted on a common housing | |
| JP3330563B2 (ja) | 微量試料分析装置 | |
| US3967122A (en) | Radiation analyzer utilizing selective attenuation | |
| JP3843601B2 (ja) | 蛍光ｘ線分析装置 | |
| JPH0228819B2 (ja) | Metsukiekibunsekisochi | |
| JP3860641B2 (ja) | 蛍光ｘ線分析装置 | |
| JPH07280750A (ja) | 波長分散型ｘ線分光装置 | |
| JPS636830B2 (en]) | ||
| Larsen et al. | Secondary-source energy-dispersive x-ray spectrometer | |
| SU868503A1 (ru) | Рентгеновский спектрометр | |
| JPH084605Y2 (ja) | 蛍光ｘ線分析装置のフィルタ交換装置 | |
| JP2584946Y2 (ja) | 蛍光ｘ線分析装置 | |
| JPS6122240A (ja) | 微小部ｘ線分析装置 |